The Alliance tool series supports processes that utilize wafer sizes up to 200 mm and feature sizes of 0.25 micron and 0.18 micron. Alliance products include the 9400SE and 9600SE.
The Alliance tool series supports processes that utilize wafer sizes up to 200 mm and feature sizes of 0.25 micron and 0.18 micron. Alliance products include the 9400SE and 9600SE.